Vacuum pressure oven (positive and negative pressure)

Item order

Class order

Make clear the rules and regulations

one

area of application

Special machine for defoaming and high temperature curing after semiconductor die bonding.

2

power

Total power of equipment

9KVA

Electric source

AC380V  3φ  50HZ  

inside measurement

Effective utilization size

Diameter 600×D600mm*2

Outer Dimensions

W1280mm×D1800mm×1840mm (reference size)

four

Equipment structure

1. Double-box circular inner container structure design is adopted, and the electric control box is located on the right side of the machine.

2. The jacketed electric heater is used to circularly heat the micro-high pressure gas circulating in the furnace, and then the ventilation function and exhaust gas are completed through forced pressurization and automatic circulating pressure relief outside the furnace, so as to maintain the gas pressure in the furnace relatively higher than the external pressure; When the gas temperature in the furnace reaches the set value, the heater will automatically stop heating, and when the temperature in the furnace is lower than the set value, the heater will automatically start to maintain the temperature stability in the furnace!

3. Vertical, the fan is located at the back of the box, and it supplies air horizontally.

6.2 sets of heating control, heater and hot air circulation system are located at the back of the box.

7. One circulating fan with power of 750W.

five

Materials and standards

1. SUS304#5.0mm stainless steel plate with concave iron reinforcement is used inside.

2. The exterior is made of SUS41# cold-rolled steel plate. The antistatic powder is painted with beige wrinkles.

3. High-grade thermal insulation cotton is used, the thickness of thermal insulation layer is 90 mm, and thermal insulation board is added.

4. High-temperature resistant silicone rubber is used for pressing, and the temperature resistance is ≥260℃.

5. Adopt powerful rotary door buckle, which can adjust American back twist.

six

Pressurization system

1. Positive pressure structure design, the furnace can bear 8 kilograms of positive pressure.

2. Install pressure regulating valve, pressure relief valve, digital display pressure gauge and equipped with gas pressure protection and high-pressure alarm to make an appointment to start and stop.

3. Safety door protection, the door can not be pressurized if it is not closed tightly, and the door can not be opened if the pressure in the furnace is less than normal pressure. Manual pressure relief and automatic pressure relief are combined.

seven

Negative pressure system

Vacuum range:-0.090 ~ 0.1 MPa.

Pumping rate: 8L/s. 。

Vacuum degree ≤50Torr

Leakage rate ≤ 100pa/h.

six

Temperature parameter

temperature range

Normal temperature ~ 200℃

Common heating time of 150℃

About 30min

Overtemperature control

XZ-480 overtemperature protector

Sensor temperature sensing accuracy

±0.3℃

150 degree uniformity

±3℃

Cooling time

150 ℃→ 60℃ < 30min (no load)

Cooling rate

Usually at 150℃, it is less than or equal to room temperature+10℃, except for the four sides of the oven door and the exhaust port.

seven

temperature control system

A. 7-inch touch screen operation, TFT LCD display, 1024*600 resolution, universal sensor input, 100ms sampling period, imported PID module, and 0.1% control accuracy.

B paperless recording function, which can record 120-day data and directly export the temperature curve.

C.R232 communication and remote monitoring function.

D. Digital setting, cut-off temperature, constant temperature timer alarm, overtemperature alarm and other functions. Each box has a set of overtemperature alarm.

E.9999 timer, signal source: imported CA sensor 0.5%. Output controlled element: SSR contactless signal output.

eight

Circulating air system

Special air path design, uniform heating temperature.

Adopt long-axis motor special for hot air oven.

Adopt strong stainless steel wind wheel.

nine

nitrogen system

Air inlet: N2 flowmeter is attached to control the air intake. Air inlet: 12mm.

Air inlet: air 1/2 "or N2 1/2"; Automatic air inlet and outlet: 3/4 ".

Nitrogen concentration: 99.99%.

10

Safety pressure protection

1. Install pressure regulating valve, pressure relief valve, digital display pressure gauge and this is a scheduled start-stop function.

2. Equipped with reservation exhaust function.

3. Equipped with gas pressure protection and high and low pressure alarm.

4. Safety door protection, the door can not be pressurized if it is not closed tightly, and the door can not be opened if the pressure in the furnace is less than normal pressure.

5. Combination of manual pressure relief and automatic pressure relief.

nine

Electrical safety protection

1. Motor overcurrent protection, phase sequence protector, leakage protector, control circuit fuse, fuse-free switch and contactor fittings all adopt first-class products meeting national standards.

2. It has the alarm function of upper limit temperature overheating and the function of temperature time keeping.

3. The motor can continue to supply air after the heating is turned off after the constant temperature is set.

10

Adhesion standard

Test methods of electric heating equipment in People‘s Republic of China (PRC) GB/T10066-2004, JB20033-2004 and safety of electric heating devices GB5959.1-2005,GB150 -1998 steel pressure vessels.

11

Internal device

Stainless steel wafer heater

12

External device

1. Air inlet, air outlet, American-style rear button, rotary strong door buckle, and four handling wheels are installed.

2. The exhaust port is located at the top of the box, and the size of the hole opening can be adjusted.

13

equip

1. Attach a 3m long power cord randomly.

2. Equipped with volatile matter treatment device to reduce volatile matter attachment and reduce cleaning and maintenance intensity.

3. Equipped with circulating water cooling device.

14

ensure the building quality

After-sales service for replacing and repairing faulty parts free of charge one year after delivery.

15

Main fittings

Partial material detail